The strong rise of semiconductor equipment industry in Liaoshen area

The semiconductor equipment manufacturing industry is a strategic and leading industry for the national economy. Under the guidance of the country’s strategic principles of enhancing independent innovation capabilities and revitalizing the old industrial bases in the Northeast over the past 10 years, Liaoning’s semiconductor equipment manufacturing industry has realized Shenyang as the center. The historical transformation from nothing to everything, from small to large, and from weak to strong: built China's first IC equipment control software platform and IC equipment professional incubator, and conquered a number of production processes and key technologies that restrict China’s semiconductor equipment and created More than 300 scientific research achievements, successfully developed 6-12 inch plasma enhanced chemical vapor deposition (PECVD), uniform development, monolithic wet etching and bump packaging spray glue series machine equipment and 300mm IC production line automatic materials A number of key parts and components such as transportation systems, direct-drive vacuum (mechanical) hands, and a roots dry pump for IC production lines fill multiple gaps in domestic products and successfully realize industrialization. Numerous key companies are cultivated and introduced. Shenyang IC Equipment Industrial Park was approved by the Ministry of Science and Technology in 2009 as the national integrated circuit equipment high-tech industrialization base, becoming one of the three largest semiconductor equipment industry bases in China.

With the maturing of equipment manufacturing industry in Liaoning, Liaoning is facing more intense and more brutal market competition under the global economic integration situation. In order to further promote the rapid development of the Liaoning equipment manufacturing industry, it is necessary to unite the enterprises closely to create industrial clusters and form upstream and downstream industrial chains, and achieve joint innovation through complementary resources and cooperative development. Therefore, the establishment of an industrial technology innovation alliance will undoubtedly become The inevitable choice to follow the development of the times. Since the pilot project of the National Technology Innovation Project was launched last year, according to the requirements of the “National Technology Innovation Project Liaoning Province Pilot Work Program” approved by the Ministry of Science and Technology, Liaoning Province has actively promoted the pilot construction of the provincial-level industrial technology innovation strategic alliance. At present, the total number of provincial-level coalition pilots in Liaoning has reached 16, among which the establishment of the Semiconductor Industry Alliance has played a very important role in promoting the development of the semiconductor industry.

In December 2010, under the strong promotion of the Liaoning Provincial Party Committee, the Provincial Government and the Liaoning Provincial Department of Science and Technology, the Liaoning Semiconductor Equipment Industry Technology Innovation Strategic Alliance was formally established. Chinese Academy of Sciences Shenyang Scientific Instrument Development Center Co., Ltd., Shenyang Xinsong Robotics Automation Co., Ltd., Shenyang Xinyuan Microelectronics Equipment Co., Ltd., Shenyang Zhongkebo Micro Automation Technology Co., Ltd., Shenyang Fuchuang Precision Equipment Co., Ltd., Shenyang Branch of Chinese Academy of Sciences Seventeen Liaoshen district semiconductor equipment companies, universities and research institutes, Northeastern University, Shenyang University of Technology and other institutes signed a coalition agreement.

In the past year, under the correct leadership of the Liaoning Provincial Party Committee and the Provincial Government, with the strong support of the Liaoning Provincial Department of Science and Technology and other departments, the Liaoning Semiconductor Equipment Industry Technology Innovation Strategic Alliance has closely united Liaoning's many semiconductor equipment manufacturers with Liaoning as the center. , Jointly carrying out key technology research and joint efforts to undertake 10 national major science and technology projects, "Very large-scale integrated circuit manufacturing technology and complete sets of technology" project, to jointly develop domestic and foreign markets, and formed an industrial chain with close connection between upstream and downstream. The country's first 12-inch PECVD equipment, TRACK equipment, the first domestic lithography equipment, Invar main baseboard and a batch of complete equipment and key components have been delivered in Shenyang.

As the cradle of the development of new China's equipment manufacturing industry, Liaoning has a good industrial base and scientific and technological advantages in the development of equipment manufacturing industry. Shenyang has nearly a hundred institutions of higher learning and research institutes, and has a national level project directly related to the semiconductor equipment industry ( There are 5 research centers and engineering laboratories, 7 provincial-level engineering (technical) research centers and key laboratories, and traditional advantages in electronics, machinery and other fields, providing abundant talents for the semiconductor equipment manufacturing industry in Shenyang. .

In 2004, Shenyang established the nation’s first IC equipment manufacturing base. In 2005, Shenyang built the only IC equipment professional incubator in the country, established the first IC professional precision parts processing center in China, and established a public technology service platform for parts precision processing, detection, and purification to provide public services for innovative R&D and product manufacturing. Technical services and supporting services for parts and components have also created a good development environment for the development of SMEs and the cultivation of reserve forces. Throughout the country, Shenyang has formed its own unique, mutually supportive, and mutually supportive three-legged power with Shanghai and Beijing.

Shenyang Zhongkebo Micro Automation Technology Co., Ltd. has a first-class research and development team. Its independently researched and developed “NCS-3000 series fully distributed industrial control system” won the first prize of the Chinese Academy of Science and Technology Progress Award and the second prize of the National Science and Technology Progress Award. prize.

Shenyang Zhongke Instrument Co., Ltd. based on its strong technical reserves in vacuum technology, precision technology processing and other aspects, has independently developed R&D and production of the Roots dry pump products to fill gaps in the domestic market, reaching the leading domestic and international advanced level; known as “Chinese robots Shenyang Xinsong, which is known as the father, has been leading the development of the robot industry and has built China's largest robot industry base.

Driven by the alliance, a group of key equipment that is advanced internationally, leading domestically, and capable of breaking foreign monopolies has achieved "one-stop" production in Shenyang. “Competitiveness of innovative products in the market depends on the competitiveness of the entire industry chain. We need to promote the alliance members to shorten the R&D cycle while reducing costs through joint procurement and sharing of infrastructure, and concentrating on accelerating the entry of products into the market, thus promoting the entire industry. Healthy development, said Zheng Guangwen, secretary general of the Council of Strategic Alliance for Technological Innovation of the Semiconductor Equipment Industry in Liaoning.

The 8-inch 0.25-micron sizing developing equipment produced by Shenyang Xinyuan Co., Ltd. has achieved a localization rate of more than 70% and a cost reduction of more than 20%, which fills the domestic gap and the overall technological level has reached the international advanced level. The development of the uniform development technology in China has improved the three product generations and has shortened the gap with the international advanced technology by 15 years.

In a short period of one year, 19 enterprises, universities, and scientific research institutes in the Liaoning-Luo-Shen region witnessed the growth of the strategic alliance for technological innovation in the semiconductor equipment industry in Liaoning and played an important role. The cooperation in production, learning, research, and application has been constantly upgraded and the company's innovation capability has been improved. With continuous improvement, the major national science and technology projects “Very large-scale integrated circuit manufacturing technology and complete sets of technologies” have progressed smoothly, the industrial chain has become more complete, the industrial support has become more compact, and the market space has become wider. Liaoning's semiconductor equipment industry has shown a rapid rise.

It is reported that Shenyang City is studying and formulating Shenyang Semiconductor Industrial Park Development Plan. Shen Xiyan, deputy head of the Xinnan New District of Shenyang City, stated that the Shenyang Semiconductor Industrial Park is a combination of manufacturing, research and development, personnel training, trade and technical services. The advanced and domestic first-class industrial agglomeration area is a technical innovation and industrialization demonstration area that represents the development direction of semiconductor technology and industry at home and abroad. It is a pilot area integrating various resource advantages, participating in international division of labor, and undertaking advanced production and manufacturing technologies.

In the future, with the promotion of the Liaoning Semiconductor Equipment Industry Technology Innovation Strategic Alliance, Liaoning's semiconductor equipment manufacturing industry will further enhance the level of equipment manufacturing in the northeast old industrial base and the independent innovation capability of China's semiconductor equipment manufacturing industry, and promote the rapid development of China's advanced equipment manufacturing industry. Development will promote the prosperity of related industries and make greater contributions to China's entry into a semiconductor-powered country.